The laboratory premises consist of two large laboratory rooms in the third floor (122 m2 + share of 86 m2), and of three clean rooms in the basement (class 1000: 105 m2 + class 100: 20 m2) of Physicum building. These premises include separate rooms for handling chemicals and radiation sources. A special chamber for laser transient current measurements is also available.
The premises are equipped with inlets for typical laboratory gases: oxygen, nitrogen and argon. Large parts of the areas are protected against electrostatic discharges (ESD). The rooms have vacuum lines for component handling and high-vacuum applications. Cooling water circulation and exhaust duct having slight underpressure are also available. In the clean rooms, particle concentration, temperature, relative humidity and oxygen level are constantly monitored.